8:30am-4:30pm, Monday, May 22, 2023, Sheraton Albuquerque Airport Hotel, Albuquerque, NM
This short course provides in-depth practical knowledge of system design and operational best practices specifically aimed at improving the efficiency of existing vacuum processes. A rigorous, physics-based description of vacuum system design and operational principles is used to guide vacuum practitioners through the methodical identification of improvement opportunities at both base and process pressures. Optimized procedures for system design, operation, preventive maintenance and pump-down improvements are covered with emphasis on equipment and instrumentation selection. The course explains physico-chemical factors limiting ultimate pressure performance in high vacuum systems which guide optimal vacuum system design, equipment specifications and operational choices. Best known practices for the selection and operation of pressure gauges, residual gas analyzers and helium leak detectors provide accurate and repeatable vacuum conditions. A proactive gas composition monitoring technique is introduced to minimize pump-down times in all high and ultra-high vacuum systems. Process tracking methodologies based on pressure measurement and gas analysis are described. Leak detection techniques based on residual gas analyzers and helium leak detectors are compared. Practical mass spectral analysis with residual gas analyzers is covered with an emphasis on pump-down tracking and process monitoring. Modern vacuum system decontamination techniques are presented. Course time will be available to discuss and troubleshoot student’s vacuum system and process improvement opportunities in a collaborative environment.
Who Should Attend?
This course was developed for technicians and process engineers. Its main objectives are to impart enough knowledge for the student to what problems may exist in their process chamber and thereby help in trying to solve these problems.
Instructor: Gerardo Brucker
Gerardo Brucker is Chief Scientist and CTO working at the Granville-Phillips Division of MKS Instruments, located in Longmont, CO. Since 1992 he has been involved in the development and commercialization of scientific instrumentation including quadrupole mass analyzers, ion trap mass spectrometers, high vacuum gauging, time-of-flight mass spectrometers, thermal analysis instrumentation and advanced quartz crystal microbalance systems. He received a B.S. in analytical chemistry from the University of Buenos Aires (Argentina) and a Ph.D. in physical chemistry from Colorado State University (Fort Collins, CO.) He was responsible for the creation of the Vacuum and Analytical Products division at Stanford Research Systems, Inc. and is presently the CTO for the Pressure Measurement and Process Solutions Groups of MKS Instruments.