Plasma and Ion Beam Diagnostics: Principles & Applications


8:30am-4:30pm, Thursday, May 25, 2023, Sheraton Albuquerque Airport Hotel, Albuquerque, NM

Course Objectives

  • Learn about the basics of gas discharges.
  • Learn about the fundamentals of industrial plasmas.
  • Learn how to use diagnostics to measure density, temperature, and energy of neutrals and charged particles in a plasma.
  • Learn how to apply diagnostics to ion beams in order to measure current, current density, energy, energy spread, beam profile, and beam divergence.
  • Learn how to measure electric and magnetic fields, and how to use various mass analyzers.
  • Know about the applications of several state-of-the-art plasma and ion beam diagnostics in research and industry.

Course Description:

Low-temperature plasmas are widely used in research and industry. Plasma diagnostics are process specific, and process improvement requires understanding of the plasmas involved. Plasma diagnostics provide the information needed to analyze and improve the desired processes.

This course reviews the fundamentals of gas discharges and low-temperature plasmas. It presents commonly used plasma diagnostics, such as the use of neutral particle detectors, electric and magnetic probes, microwave interferometry, and optical diagnostics instrumentation to measure density, temperature, and kinetic energy of the plasma particles. In addition, ion-beam diagnostics relevant to the measurement of current density, kinetic energy, energy spread, and mass analysis will be discussed. For each diagnostic technique, the why, what, and how of the measurements will be presented and will be followed by practical examples and applications.

Who Should Attend?

Technicians, engineers, scientists, and supervisory personnel involved in the development, improvement, and applications of plasma and ion-beam technologies.

Instructor: Abe Ghanbari

Dr. Ghanbari, Vice President Engineering Technology at ONTO Innovation, directs development of inspection and yield management systems and technologies for advanced semiconductor packaging.

Prior to ONTO Innovation, Abe was Vice President Technology at Materion Corporation responsible for developing thin film coating and optical filters for the photonics industry.

Abe’s experience includes leading the accelerated development and deployment of more than 50 state-of-the-art capital equipment products that implement leading-edge plasma and thin-film technologies used in semiconductor, optics and solar industries. Abe started his career in R&D at Varian Corporation, followed by a variety of product development and general management roles at Sony, Applied Materials, II-VI Corp. and Semblant. He currently serves on the advisory board of several technology centers, start-ups, and well-established companies. Throughout his career, he has developed technologies, products and processes that provide solutions to meet the needs of customers in emerging markets.
Abe holds a Ph.D. in engineering & applied physics from Cornell University, M.S. in plasma science, and B.S. in electrical engineering from the University of Illinois, M.B.A. from Saint Mary’s College with emphasis in operations and marketing, management. He is a holder of 15 patents.

Course Materials

Course notes

Cost:  $790

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